Articole din publicaţii internaţionale: Recent submissions

  • 3D–2D crossover in melting transition on superconducting Mo/Si multilayers 
    FOGEL, Nina Ya.; CHERKASOVA, V. G.; RYBALCHENKO, V. N.; KORETZKAYA, O. A.; SIDORENKO, A. S. (Springer Nature Switzerland, 1996)
    Two-dimensional and three-dimensional vortex-lattice melting is observed on superconducting Mo/Si multilayers. Quasi-2D melting takes place in the range of high magnetic fields. The position of the melting transition on ...
  • Wafer level vacuum packaging of micro-mirrors with buried signal lines 
    LANGA, S.; DRABE, C.; HERRMANN, A.; LUDEWIG, T.; RIECK, A.; FLEMMING, A.; KADEN, C. (Springer Nature Switzerland, 2015)
    This paper presents the vacuum wafer level packaging of in-house manufactured two-dimensional micro- mirrors based on the electrostatic driving principle, fabricated using a bulk technology on bonded-silicon-on-insulator ...
  • Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers 
    SANDNER, Thilo; GAUMONT, Eric; GRASSHOFF, Thomas; AUBÖCK, Gerald; KENDA, Andreas; GISLER, Thomas; LANGA, Sergiu; HERRMANN, Andreas; GRAHMANN, Jan (Society of Photo-Optical Instrumentation Engineers, SPIE, 2018)
    A translatory MOEMS actuator with extraordinarily large stroke - especially developed for fast optical path-length modulation in miniaturized FT-spectrometers (FTS) designed for NIR spectral region (800 nm – 2500 nm) - is ...
  • The Impact of Porosity upon the Cathodoluminescence from III-V Compounds 
    STEVENS-KALCEFF, M. A.; TIGINYANU, I. M.; LANGA, S.; FÖLL, H. (Cambridge University Press, 2002)
    The development of applications involving porous materials requires understanding of their special properties. Most published investigations have used photoluminescence (PL) techniques to determine the average emission ...
  • Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive 
    LANGA, S.; CONRAD, H.; KAISER, B.; STOLZ, M.; GAUDET, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H. (Springer Nature Switzerland, 2003)
    This paper presents the technological aspects of a newly demonstrated actuation principle, the so-called nano-e-drive. Using this principle, cantilevers can be moved in or out of chip plane. In this paper, only the ...
  • Selforganized formation of crystallographically oriented octahedral cavities during electrochemical pore etching 
    LÖLKES, S.; CHRISTOPHERSEN, M.; LANGA, S.; CARSTENSEN, J.; FÖLL, H. (ELSEVIER, 2003)
    The parameter dependence of electrochemically etched pores in silicon is studied. Using HF containing organic electrolytes and backside illumination on moderately doped silicon, macropores and octahedrally shaped pores can ...
  • Self-organized pore formation and open-loop control in semiconductor etching 
    CLAUSSEN, Jens Christian; CARSTENSEN, Jürgen; CHRISTOPHERSEN, Marc; LANGA, Sergiu; FÖLL, Helmut (American Institute of Physics, 2003)
    Electrochemical etching of semiconductors, apart from many technical applications, provides an interesting experimental setup for self-organized structure formation capable, e.g., of regular, diameter-modulated, and branching ...
  • Self-Organized Formation of Fractal and Regular Pores in Semiconductors 
    CLAUSSEN, Jens Christian; CARSTENSEN, Jürgen; CHRISTOPHERSEN, Marc; LANGA, Sergiu; FÖLL, Helmut (Springer Nature Switzerland, 2003)
    Electrochemical etching of semiconductors, beside technical applications, provides an interesting experimental setup for self-organized structure formation capable of regular, diameter-modulated, and branching pores. The ...
  • Room temperature bonding for vacuum applications: climatic and long time tests 
    LANGA, S.; UTSUMI, J.; LUDEWIG, T.; DRABE, C. (Springer Nature Switzerland, 2013)
    A detailed and quantitative motivation for the necessity of room temperature (RT) bonding for wafer level packaging of silicon micro-mirrors will be given. Results on RT 6 inch wafer bonding with vacuum encapsulation on ...
  • Open-loop-control of pore formation in semiconductor etching 
    CLAUSSEN, J. C.; CARSTENSEN, J.; CHRISTOPHERSEN, M.; LANGA, S.; FOLL, H. (IEEE, 2003)
    Electrochemical etching of semiconductors gives rise to a wide variety of self-organized structures including fractal structures, regular and branching pores. The Current-Burst Model and the Aging Concept are considered ...
  • Large area etching for porous semiconductors 
    CARSTENSEN, J.; CHRISTOPHERSEN, M.; LÖLKES, S.; OSSEI-WUSU, E.; BAHR, J.; LANGA, S.; POPKIROV, G.; FÖLL, H. (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2005)
    While electrochemical etching of small samples in the 1 cm region is relatively easy, this is not true for large areas, i.e. standard wafer sizes up to 300 mm. The paper outlines the specific demands and difficulties in ...
  • Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique 
    KOLKOVSKY, Vl.; STÜBNER, R.; LANGA, S.; WENDE, U.; KAISER, B.; CONRAD, H.; SCHENK, H. (ELSEVIER, 2016)
    In the present study the electrical properties of 100nm and 400nm alumina films grown by the atomic layer deposition technique on p-type Si before and after a post-deposition annealing at 440°C and after a dc H plasma ...
  • First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition 
    GUARACAO, J. M. M.; KIRCHER, M.; WALL, F.; KRENKEL, M.; KAISER, B.; LANGA, S.; SCHENK, H. (IEEE, 2020)
    The design, fabrication, and acoustic characterization of an electrostatic ultrasound transducer based on lateral actuation is documented in this letter. Unlike cMUTs or pMUTs, this device-NED-MUT -does not use a membrane ...
  • Fast pore etching 
    FREY, S.; KEMELL, M.; CARSTENSEN, J.; LANGA, S.; FÖLL, H. (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2005)
    The growth of silicon macropores under high current densities and high HF concentrations is studied. A new growth mode for porous Si has been found where pores resemble the so-called current line oriented pores previously ...
  • Enhancement of vertical integration density by engineered BSOI wafers 
    KADEN, C.; LANGA, S.; LUDEWIG, T.; SCHÖNBERGER, A.; HERRMANN, A.; GÖBEL, A.; KOLKOVSKY, V.; JEROCH, W.; PUFE, W. (Springer Nature Switzerland, 2018)
    The lateral and vertical integration density of bulk microelectromechanical systems (MEMS) using bonded silicon-on-insulator (BSOI) wafers is significantly enhanced if the handle wafer is used as an electrical redistribution ...
  • Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration 
    UHLIG, Sebastian; GAUDET, Matthieu; LANGA, Sergiu; SCHIMMANZ, Klaus; CONRAD, Holger; KAISER, Bert; SCHENK, Harald (MDPI (Basel, Switzerland), 2018)
    In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of ...
  • Electrostatic bending actuators with a liquid filled nanometer scale gap 
    GAUDET, M.; UHLIG, S.; STOLZ, M.; ARSCOTT, S.; CONRAD, H.; LANGA, S.; KAISER, B.; SCHENK, H. (IEEE, 2017)
    We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an ...
  • Electrochemically-Prepared 2D and 3D Photonic Crystals 
    WEHRSPOHN, Ralf B.; SCHILLING, Jörg; CHOI, Jinsub; LUO, Yun; MATTHIAS, Sven; SCHWEIZER, Stefan L.; MÜLLER, Frank; GÖSELE, Ulrich; LÖLKES, Stefan; LANGA, Sergiu; CARSTENSEN, Jürgen; FÖLL, Helmut (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2004)
    In the last ten years, ordered pore arrays with high aspect ratio have been studied extensively. Ordered porous dielectric materials are intrinsic 2D photonic crystals. Although there is a large variety of materials ...
  • Electrochemical pore etching in Ge – An overview 
    FANG, C.; FÖLL, H.; CARSTENSEN, J.; LANGA, S. (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2007)
    While electrochemical pore etching in semiconductors has become a thriving field for research (and applications) in the past 15 years or so, little work has been done in Ge. Besides Si, Ge is the only semiconductor with a ...
  • Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers 
    KAISER, Bert; LANGA, Sergiu; EHRIG, Lutz; STOLZ, Michael; SCHENK, Hermann; CONRAD, Holger; SCHENK, Harald; SCHIMMANZ, Klaus; SCHUFFENHAUER, David (Springer Nature Limited, 2019)
    MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption ...

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