Ultra-thin TiO2 films by atomic layer deposition and surface functionalization with au nanodots for sensing applications

Abstract

The presented study demonstrates the importance of the film thickness and surface functionalization with noble metals nanoclusters for sensing applications of ultra-thin TiO2 layers. Such ultra-thin films could be used for the development of a series of integrated detectors and chemical field effect transistors (chemFETs) directly on highly complex chips.