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Ultra-thin TiO2 films by atomic layer deposition and surface functionalization with au nanodots for sensing applications
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| dc.contributor.author | LUPAN, Oleg | |
| dc.contributor.author | POSTICA, Vasile | |
| dc.contributor.author | ABABII, Nicolai | |
| dc.contributor.author | REIMER, Tim | |
| dc.contributor.author | SHREE, Sindu | |
| dc.contributor.author | HOPPE, Mathias | |
| dc.contributor.author | POLONSKYI, Oleksandr | |
| dc.contributor.author | SONTEA, Victor | |
| dc.contributor.author | CHEMNITZ, Steffen | |
| dc.contributor.author | FAUPEL, Franz | |
| dc.contributor.author | ADELUNG, Rainer | |
| dc.date.accessioned | 2020-05-25T06:43:34Z | |
| dc.date.available | 2020-05-25T06:43:34Z | |
| dc.date.issued | 2018 | |
| dc.identifier.citation | LUPAN, Oleg, POSTICA, Vasile, ABABII, Nicolai et al. Ultra-thin TiO2 films by atomic layer deposition and surface functionalization with au nanodots for sensing applications. In: Materials science in semiconductor processing. 2018, vol. 871, pp. 44-53. ISSN 1369-8001. | en_US |
| dc.identifier.issn | 1369-8001 | |
| dc.identifier.uri | https://doi.org/10.1016/j.mssp.2018.06.031 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/8369 | |
| dc.description | Access full text - https://doi.org/10.1016/j.mssp.2018.06.031 | en_US |
| dc.description.abstract | The presented study demonstrates the importance of the film thickness and surface functionalization with noble metals nanoclusters for sensing applications of ultra-thin TiO2 layers. Such ultra-thin films could be used for the development of a series of integrated detectors and chemical field effect transistors (chemFETs) directly on highly complex chips. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | ELSEVIER | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | ultra-thin films | en_US |
| dc.subject | thin films | en_US |
| dc.subject | films | en_US |
| dc.subject | atomic layer depositions | en_US |
| dc.subject | gas sensors | en_US |
| dc.subject | UV photodetectors | en_US |
| dc.subject | photodetectors | en_US |
| dc.title | Ultra-thin TiO2 films by atomic layer deposition and surface functionalization with au nanodots for sensing applications | en_US |
| dc.type | Article | en_US |
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