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Showing 10 out of a total of 43 results for collection: Articole din publicaţii internaţionale.
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Enhancement of vertical integration density by engineered BSOI wafers
KADEN, C.
;
LANGA, S.
;
LUDEWIG, T.
;
SCHÖNBERGER, A.
;
HERRMANN, A.
;
GÖBEL, A.
;
KOLKOVSKY, V.
;
JEROCH, W.
;
PUFE, W.
(
Springer Nature Switzerland
,
2018
)
First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition
GUARACAO, J. M. M.
;
KIRCHER, M.
;
WALL, F.
;
KRENKEL, M.
;
KAISER, B.
;
LANGA, S.
;
SCHENK, H.
(
IEEE
,
2020
)
Fast pore etching
FREY, S.
;
KEMELL, M.
;
CARSTENSEN, J.
;
LANGA, S.
;
FÖLL, H.
(
WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
,
2005
)
Influence of annealing in H atmosphere on the electrical properties of Al2O3 layers grown on p-type Si by the atomic layer deposition technique
KOLKOVSKY, Vl.
;
STÜBNER, R.
;
LANGA, S.
;
WENDE, U.
;
KAISER, B.
;
CONRAD, H.
;
SCHENK, H.
(
ELSEVIER
,
2016
)
Open-loop-control of pore formation in semiconductor etching
CLAUSSEN, J. C.
;
CARSTENSEN, J.
;
CHRISTOPHERSEN, M.
;
LANGA, S.
;
FOLL, H.
(
IEEE
,
2003
)
Large area etching for porous semiconductors
CARSTENSEN, J.
;
CHRISTOPHERSEN, M.
;
LÖLKES, S.
;
OSSEI-WUSU, E.
;
BAHR, J.
;
LANGA, S.
;
POPKIROV, G.
;
FÖLL, H.
(
WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
,
2005
)
Room temperature bonding for vacuum applications: climatic and long time tests
LANGA, S.
;
UTSUMI, J.
;
LUDEWIG, T.
;
DRABE, C.
(
Springer Nature Switzerland
,
2013
)
Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive
LANGA, S.
;
CONRAD, H.
;
KAISER, B.
;
STOLZ, M.
;
GAUDET, M.
;
UHLIG, S.
;
SCHIMMANZ, K.
;
SCHENK, H.
(
Springer Nature Switzerland
,
2003
)
Wafer level vacuum packaging of micro-mirrors with buried signal lines
LANGA, S.
;
DRABE, C.
;
HERRMANN, A.
;
LUDEWIG, T.
;
RIECK, A.
;
FLEMMING, A.
;
KADEN, C.
(
Springer Nature Switzerland
,
2015
)
Selforganized formation of crystallographically oriented octahedral cavities during electrochemical pore etching
LÖLKES, S.
;
CHRISTOPHERSEN, M.
;
LANGA, S.
;
CARSTENSEN, J.
;
FÖLL, H.
(
ELSEVIER
,
2003
)
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Author
LANGA, S. (43)
FÖLL, H. (31)
TIGINYANU, I. M. (27)
CARSTENSEN, J. (25)
CHRISTOPHERSEN, M. (18)
KAISER, B. (7)
SCHENK, H. (7)
CONRAD, H. (6)
GAUDET, M. (4)
LÖLKES, S. (4)
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Subject
pores (14)
semiconductors (8)
electrochemical etching (7)
anodic etching (6)
porous layers (6)
porous structures (4)
silicon (4)
crystals (3)
layers (3)
macropores (3)
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Date Issued
2010 - 2020 (10)
2000 - 2009 (32)
1999 - 1999 (1)
Has File(s)
Yes (43)