SHISHIYANU, S. T.; LUPAN, O. I.; SHISHIYANU, T. S.; ŞONTEA, V. P.; RAILEAN, S. K.
(ELSEVIER, 2004)
Anodic oxidation under ultraviolet (UV) illumination and rapid photothermal processing technique used for high quality oxide preparation in terms of device surface passivation and gate or tunnel dielectrics are reported.