Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity

BRYNZARI, V.; DMITRIEV, S.; KOROTCHENKOV, G.

dc.contributor.author	BRYNZARI, V.
dc.contributor.author	DMITRIEV, S.
dc.contributor.author	KOROTCHENKOV, G.
dc.date.accessioned	2020-09-17T13:13:18Z
dc.date.available	2020-09-17T13:13:18Z
dc.date.issued	2005
dc.identifier.citation	BRYNZARI, V., DMITRIEV, S., KOROTCHENKOV, G. Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity. In: Moldavian Journal of the Physical Sciences. 2005, vol. 4 (1), pp. 98-101. ISSN 1810-648X.	en_US
dc.identifier.issn	1810-648X
dc.identifier.uri	http://repository.utm.md/handle/5014/9557
dc.description.abstract	This paper presents result of investigation aimed at the improvement of gas sensitive properties of SnO2 thin film gas sensors (TFGS) by means of high frequency (HF) oxygen plasma treatment and its surface doping. Used in experiments SnO2 films were deposited by spray pyrolysis method. It is shown that plasma treatment provides 3-4 times growth of thin film gas sensitivity. Surface doping of SnO2 films with Pd leads to gas sensitivity increasing by order. It is concluded that combination of HF oxygen plasma treatment and surface sensibilization through surface doping is an effective way to considerable improvement of gas sensitive properties of tin dioxide based TFGS.	en_US
dc.language.iso	en	en_US
dc.publisher	Academy of Sciences of Moldova	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	gas sensitive properties	en_US
dc.subject	oxygen plasma treatment	en_US
dc.subject	tin dioxide thin films	en_US
dc.subject	spray pyrolysis method	en_US
dc.title	Plasma treatment and surface sensibilization of tin dioxide films for enhancement of gas sensitivity	en_US
dc.type	Article	en_US