Superimposed diffraction gratings formed by e-beam recording in chalcogenide films

Abstract

It was established, that at low values of recording current the independent superimposition (without reciprocal effect) of crossed index gratings can be occurred. Contrary to this, in the case of the relief structures the efficiencies of superimposed gratings were smaller, than ones of the same single gratings even for low recording currents. For structures composed of four identical crossed gratings of 1 μm period the maximum diffraction efficiency of each constituent grating was about 5 % in comparison with one of 33 % for single grating.