TIGINYANU, Ion; POPA, Veaceslav; STEVENS-KALCEFF, Marion A.
(Society of Photo-Optical Instrumentation Engineers, SPIE, 2011)
We show that by subjecting GaN epilayers on sapphire substrates to low-energy/low-dose ion treatment with subsequent photoelectrochemical etching it is possible to fabricate ultra-thin GaN membranes in the form of nano-roof ...