ANDREYEV, V. M.; EGOROV, V. V.; SYRBU, A. V.; TROFIM, V. G.; YAKOVLEV, V. P.
(WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 1980)
A method of fabrication of planar local structures using the selective epitaxial growth of GaAs and AIGaAs layers from liquid phase on profiled GaAs substrates was developed. The planar regrowth of the recesses formed in ...