Browsing Articole ştiinţifice by Author "UHLIG, S."

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  • Electrostactically in-plane driven silicon micropump for modular configuration 
    UHLIG, S.; GAUDET, M.; LANGA, S.; SCHIMMANZ, K.; CONRAD, H.; KAISER, B.; SCHENK, H. (University of Twente, 2017)
    We present an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators capable of deflecting beyond the electrode gap distance. The so called ...
  • Electrostatic bending actuators with a liquid filled nanometer scale gap 
    GAUDET, M.; UHLIG, S.; STOLZ, M.; ARSCOTT, S.; CONRAD, H.; LANGA, S.; KAISER, B.; SCHENK, H. (IEEE, 2017)
    We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an ...
  • A Novel Electrostatic Actuator Class 
    CONRAD, H.; KAISER, B.; GAUDET, M.; LANGA, S.; STOLZ, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H. (ELSEVIER, 2016)
    Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. These actuators suffer from an operational instability, the so-called ...
  • Technological aspects of a new micro-electro-mechanical actuation principle: nano-e-drive 
    LANGA, S.; CONRAD, H.; KAISER, B.; STOLZ, M.; GAUDET, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H. (Springer Nature Switzerland, 2003)
    This paper presents the technological aspects of a newly demonstrated actuation principle, the so-called nano-e-drive. Using this principle, cantilevers can be moved in or out of chip plane. In this paper, only the ...

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