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Browsing Articole ştiinţifice by Author "LANGA, Sergiu"

Browsing Articole ştiinţifice by Author "LANGA, Sergiu"

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  • Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers 
    KAISER, Bert; LANGA, Sergiu; EHRIG, Lutz; STOLZ, Michael; SCHENK, Hermann; CONRAD, Holger; SCHENK, Harald; SCHIMMANZ, Klaus; SCHUFFENHAUER, David (Springer Nature Limited, 2019)
    MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption ...
  • A contribution to the expansion of the applicability of electrostatic forces in micro transducers 
    SCHENK, Harald; CONRAD, Holger; GAUDET, Matthieu; UHLIG, Sebastian; KAISER, Bert; LANGA, Sergiu; STOLZ, Michael; SCHIMMANZ, Klaus (Society of Photo-Optical Instrumentation Engineers, SPIE, 2017)
    Electrostatic actuation is highly efficient at micro and nanoscale. However, large deflection in common electrostatically driven MEMS requires large electrode separation and thus high driving voltages. To offer a solution ...
  • Electrochemically-Prepared 2D and 3D Photonic Crystals 
    WEHRSPOHN, Ralf B.; SCHILLING, Jörg; CHOI, Jinsub; LUO, Yun; MATTHIAS, Sven; SCHWEIZER, Stefan L.; MÜLLER, Frank; GÖSELE, Ulrich; LÖLKES, Stefan; LANGA, Sergiu; CARSTENSEN, Jürgen; FÖLL, Helmut (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2004)
    In the last ten years, ordered pore arrays with high aspect ratio have been studied extensively. Ordered porous dielectric materials are intrinsic 2D photonic crystals. Although there is a large variety of materials ...
  • Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration 
    UHLIG, Sebastian; GAUDET, Matthieu; LANGA, Sergiu; SCHIMMANZ, Klaus; CONRAD, Holger; KAISER, Bert; SCHENK, Harald (MDPI (Basel, Switzerland), 2018)
    In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of ...
  • Refracţia negativă 
    LANGA, Sergiu; TIGHINEANU, Ion (Institutul de Inginerie Electronică şi Nanotehnologii "D. Ghiţu" al AŞM, 2003)
    Până nu demult se considera că indicele de refracţie al materialelor obişnuite, cum ar fi, de exemplu, arhicunoscutul Si, poate lua numai valori pozitive mai mari decât 1. Insă nimeni nu ne împiedică sa considerăm, cel ...
  • Self-Organized Formation of Fractal and Regular Pores in Semiconductors 
    CLAUSSEN, Jens Christian; CARSTENSEN, Jürgen; CHRISTOPHERSEN, Marc; LANGA, Sergiu; FÖLL, Helmut (Springer Nature Switzerland, 2003)
    Electrochemical etching of semiconductors, beside technical applications, provides an interesting experimental setup for self-organized structure formation capable of regular, diameter-modulated, and branching pores. The ...
  • Self-organized pore formation and open-loop control in semiconductor etching 
    CLAUSSEN, Jens Christian; CARSTENSEN, Jürgen; CHRISTOPHERSEN, Marc; LANGA, Sergiu; FÖLL, Helmut (American Institute of Physics, 2003)
    Electrochemical etching of semiconductors, apart from many technical applications, provides an interesting experimental setup for self-organized structure formation capable, e.g., of regular, diameter-modulated, and branching ...
  • A small-gap electrostatic micro-actuator for large deflections 
    CONRAD, Holger; SCHENK, Harald; KAISER, Bert; LANGA, Sergiu; GAUDET, Matthieu; SCHIMMANZ, Klaus; STOLZ, Michael; LENZ, Miriam (Springer Nature Limited, 2015)
    Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of ...
  • Translatory MEMS actuator with wafer level vacuum package for miniaturized NIR Fourier transform spectrometers 
    SANDNER, Thilo; GAUMONT, Eric; GRASSHOFF, Thomas; AUBÖCK, Gerald; KENDA, Andreas; GISLER, Thomas; LANGA, Sergiu; HERRMANN, Andreas; GRAHMANN, Jan (Society of Photo-Optical Instrumentation Engineers, SPIE, 2018)
    A translatory MOEMS actuator with extraordinarily large stroke - especially developed for fast optical path-length modulation in miniaturized FT-spectrometers (FTS) designed for NIR spectral region (800 nm – 2500 nm) - is ...
  • ZnSe-based conductive nanotemplates for nanofabrication 
    MONAICO, Eduard; TIGHINEANU, Petru; LANGA, Sergiu; HARTNAGEL, Hans L.; TIGINYANU, Ion (WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2009)
    We show that anodic etching of n-type ZnSe crystalline substrates leads to the formation of pores which, after nucleation at surface defects, prove to follow the current lines, exhibiting multiplication until the front of ...

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