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Browsing Articole ştiinţifice by Author "KAISER, Bert"

Browsing Articole ştiinţifice by Author "KAISER, Bert"

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  • Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers 
    KAISER, Bert; LANGA, Sergiu; EHRIG, Lutz; STOLZ, Michael; SCHENK, Hermann; CONRAD, Holger; SCHENK, Harald; SCHIMMANZ, Klaus; SCHUFFENHAUER, David (Springer Nature Limited, 2019)
    MEMS-based micro speakers are attractive candidates as sound transducers for smart devices, particularly wearables and hearables. For such devices, high sound pressure levels, low harmonic distortion and low power consumption ...
  • A contribution to the expansion of the applicability of electrostatic forces in micro transducers 
    SCHENK, Harald; CONRAD, Holger; GAUDET, Matthieu; UHLIG, Sebastian; KAISER, Bert; LANGA, Sergiu; STOLZ, Michael; SCHIMMANZ, Klaus (Society of Photo-Optical Instrumentation Engineers, SPIE, 2017)
    Electrostatic actuation is highly efficient at micro and nanoscale. However, large deflection in common electrostatically driven MEMS requires large electrode separation and thus high driving voltages. To offer a solution ...
  • Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration 
    UHLIG, Sebastian; GAUDET, Matthieu; LANGA, Sergiu; SCHIMMANZ, Klaus; CONRAD, Holger; KAISER, Bert; SCHENK, Harald (MDPI (Basel, Switzerland), 2018)
    In this paper, an in-plane reciprocating displacement micropump for liquids and gases which is actuated by a new class of electrostatic bending actuators is reported. The so-called “Nano Electrostatic Drive” is capable of ...
  • A small-gap electrostatic micro-actuator for large deflections 
    CONRAD, Holger; SCHENK, Harald; KAISER, Bert; LANGA, Sergiu; GAUDET, Matthieu; SCHIMMANZ, Klaus; STOLZ, Michael; LENZ, Miriam (Springer Nature Limited, 2015)
    Common quasi-static electrostatic micro actuators have significant limitations in deflection due to electrode separation and unstable drive regions. State-of-the-art electrostatic actuators achieve maximum deflections of ...

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