HAREA, E. E.; AIFANTIS, K. E.; PYRTSAC, K. M.; POPA, M. N.; GHIMPU, L.
(Institutul de Fizică Aplicată al AŞM, 2014)
ITO films based sensors are largely studied last two decades. Piezoelectric properties were investigated depending on parameters and suitable manufacturing methods, ITO film thickness, thermal treatment etc. They belong ...