Nanostructured Film of Indium Phosphide as Biosensor in 1D Array Electrowetting System

Abstract

We demonstrated the fabrication of complex nanostructured InP membranes with porous compact packed structure that have been cut during electrochemical etching in the same anodic process. The membranes were filled with optically transparent compounds. The compounds deposition in the porous structure was carried out in diverse conditions: temperature, light, bake. The monomer was incorporated into the porous layer from a [Zn(C3N2(C6H5)2NO2)2(CH3OH)2] and [Ni(C3N2(C6H5)2NO2)2(CH3OH)2] solution. We considered the covering of the nanoporous film and filling the pores with coordination compounds imprinted with nano metallic particles in order to stabilize and adjust the sensor characteristics for specific biological samples. Also we designed and fabricated lab-on-a-chip devices based on Si which can be used for transporting bio-samples to the detector by means of electrowetting method. The experimental study and simulations based on Finite Element Model (FEM) and Finite-difference time-domain Model (FDTD) show also that the obtained materials are promising for nonlinear optical applications, in particular for the development of electrowetting systems for MEMS, MOEMS, etc.