Microtechnology with SILAR and RPP for semiconductor oxide gas sensors

SHISHIYANU, S. T.; SHISHIYANU, T. S.; LUPAN, O. I.

dc.contributor.author	SHISHIYANU, S. T.
dc.contributor.author	SHISHIYANU, T. S.
dc.contributor.author	LUPAN, O. I.
dc.date.accessioned	2020-08-24T12:05:35Z
dc.date.available	2020-08-24T12:05:35Z
dc.date.issued	2005
dc.identifier.citation	SHISHIYANU, S. T., SHISHIYANU, T. S., LUPAN, O. I. Microtechnology with SILAR and RPP for semiconductor oxide gas sensors. In: International Semiconductor Conference: proceed., 3-5 Oct. 2006, Sinaia, 2005, V. 1, p. 205-208. ISBN 0-7803-9214-0.	en_US
dc.identifier.isbn	0-7803-9214-0
dc.identifier.uri	https://doi.org/10.1109/SMICND.2005.1558748
dc.identifier.uri	http://repository.utm.md/handle/5014/9119
dc.description	Access full text - https://doi.org/10.1109/SMICND.2005.1558748	en_US
dc.description.abstract	Microtechnology with Successive Ionic Layer Adsorption and Reaction (SILAR) technique and rapid photothermal processing (RPP) was elaborated and applied for semiconductor oxides gas sensors. The experimental results shown that by RPP is possible to control the surface morphology, photoluminescence, sensing properties and operating temperature of impurity doped zinc oxide thin films. The highest sensitivity to 1.5 ppm NO/sub 2/ was obtained for 5 - 10 at.% Sn concentration in the solution of ions and RPP temperature of 550-650/spl deg/C.	en_US
dc.language.iso	en	en_US
dc.publisher	Institute of Electrical and Electronics Engineerings, IEEE	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	gas sensors	en_US
dc.subject	adsorption	en_US
dc.subject	photothermal effects	en_US
dc.subject	surface morphology	en_US
dc.subject	photoluminescence	en_US
dc.subject	zinc compounds	en_US
dc.subject	semiconductors	en_US
dc.subject	impurities	en_US
dc.subject	semiconductor oxide gas sensors	en_US
dc.subject	photothermal processing	en_US
dc.subject	surface morphology	en_US
dc.subject	gas detectors	en_US
dc.subject	zinc oxide	en_US
dc.subject	tin	en_US
dc.subject	thin film sensors	en_US
dc.subject	surface morphology	en_US
dc.subject	temperature sensors	en_US
dc.subject	substrates	en_US
dc.subject	sputtering	en_US
dc.subject	glass	en_US
dc.subject	scanning electron microscopy	en_US
dc.title	Microtechnology with SILAR and RPP for semiconductor oxide gas sensors	en_US
dc.type	Article	en_US