PURICA, M.; BUDIANU, E.; RUSU, E.; DANILA, M.; GAVRILA, R.
(IEEE, 1998)
Transparent and conductive ZnO thin films have been prepared by a method derived from chemical vapor deposition using Zn (C/sub 5/H/sub 7/O/sub 2/)/sub 2/ as Zn source. The deposited thin ZnO layers of /spl sim/0,1 /spl ...