GAUDET, M.; UHLIG, S.; STOLZ, M.; ARSCOTT, S.; CONRAD, H.; LANGA, S.; KAISER, B.; SCHENK, H.
(IEEE, 2017)
We report a considerable improvement in the electrostatic actuation of silicon-based nano electrostatic drive (NED) structures [1] via the insertion of a liquid into the nanosystem. The dielectric liquid provides an ...