SANDNER, Thilo; GAUMONT, Eric; GRASSHOFF, Thomas; AUBÖCK, Gerald; KENDA, Andreas; GISLER, Thomas; LANGA, Sergiu; HERRMANN, Andreas; GRAHMANN, Jan
(Society of Photo-Optical Instrumentation Engineers, SPIE, 2018)
A translatory MOEMS actuator with extraordinarily large stroke - especially developed for fast optical path-length modulation in miniaturized FT-spectrometers (FTS) designed for NIR spectral region (800 nm – 2500 nm) - is ...