COJOCARU, Ala; CARSTENSEN, Jürgen; LEISNER, Malte; FÖLL, Helmut; TIGINYANU, Ion
(WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2009)
Electrochemical etching of n-type silicon in viscous-electrolyte containing HF for macropore formation has been employed to obtain deep pores at high growth rates. Under certain conditions, a new kind of macropore growth ...