POPA, Veaceslav; TIGINYANU, Ion; VOLCIUC, Olesea; SARUA, Andrei; KUBALL, Martin; HEARD, Peter
(ELSEVIER, 2008)
We demonstrate the possibility for controlled nanostructuring of GaN by focused-ion-beam treatment with subsequent photoelectrochemical (PEC) etching. The proposed maskless approach based on direct writing of surface ...