LANGA, S.; DRABE, C.; HERRMANN, A.; LUDEWIG, T.; RIECK, A.; FLEMMING, A.; KADEN, C.
(Springer Nature Switzerland, 2015)
This paper presents the vacuum wafer level packaging of in-house manufactured two-dimensional micro- mirrors based on the electrostatic driving principle, fabricated using a bulk technology on bonded-silicon-on-insulator ...