TIGINYANU, I. M.; POPA, V.; STEVENS-KALCEFF, M. A.; GERTHSEN, D.; BRENNER, P.; PAVLIDIS, D.
(WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim, 2012)
We report the maskless fabrication of ultrathin suspended GaN membranes designed by focused ion beam treatment of the GaN epilayer surface with subsequent photoelectrochemical etching. This technological approach allows ...