Indium-tin-oxide thin film strain-sensor behaviors study using cyclic indentation

Abstract

ITO films based sensors are largely studied last two decades. Piezoelectric properties were investigated depending on parameters and suitable manufacturing methods, ITO film thickness, thermal treatment etc. They belong to the class of ceramic sensors with outstanding physical properties, such as: thermal, electrical and chemical stability, adhesion [1], transparency, thermoelectricity, conductivity, piezoresistivity. Possibility of obtaining of ITO films on a wide range of substrates of different chemical origin opens the way for the devices manufacturing of complex use. For example, the use of ITO films as transparent contacts for solar cells can serve simultaneously to measure their temperature, or linear dimensional variation under thermal or mechanical deformation [2].