Comb drive actuated chip with three dimensional movement

DOROGAN, Andrei

dc.contributor.author	DOROGAN, Andrei
dc.date.accessioned	2021-10-01T11:32:13Z
dc.date.available	2021-10-01T11:32:13Z
dc.date.issued	2007
dc.identifier.citation	DOROGAN, Andrei. Comb drive actuated chip with three dimensional movement. In: Annals of the Oradea University, 2007, V. 6 (16), pp. 701-706.	en_US
dc.identifier.uri	http://repository.utm.md/handle/5014/17526
dc.description.abstract	The following work reflects the scientific results obtained during a staging process in Neuchâtel, Switzerland in the frame of an international project SCOPES IB no. 7420-1100981/1. In the work is presented the design of two concept models that are a modification of a chip based on comb actuation effect developed for the INTEL company. The models posses an additional Z axis movement for integrating a 3 plane movement of the lens platform for obtaining a better coupling efficiency of the laser beam in optic modules used in fibre optic communication systems.	en_US
dc.language.iso	en_US	en_US
dc.publisher	Oradea University	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	optical microelectromechanical systems	en_US
dc.subject	microelectromechanical systems	en_US
dc.subject	comb drives	en_US
dc.subject	light collimating chips	en_US
dc.subject	collimating chips	en_US
dc.subject	chips	en_US
dc.title	Comb drive actuated chip with three dimensional movement	en_US
dc.type	Article	en_US