Binary Superimposed Gratings Formed by e-Beam Recording in Amorphous AsS Films

SERGEEV, S. A.; IOVU, M. S.; ENACHI, M. A.

dc.contributor.author	SERGEEV, S. A.
dc.contributor.author	IOVU, M. S.
dc.contributor.author	ENACHI, M. A.
dc.date.accessioned	2021-04-05T10:42:55Z
dc.date.available	2021-04-05T10:42:55Z
dc.date.issued	2014
dc.identifier.citation	SERGEEV, S. A., IOVU, M. S., ENACHI, M. A. Binary Superimposed Gratings Formed by e-Beam Recording in Amorphous AsS Films. In: Journal of Nanoelectronics and Optoelectronics. 2014, V. 9, N. 2, pp. 291-294. ISSN‎: 1555-130X (print), 1555-131 (web).	en_US
dc.identifier.uri	https://doi.org/10.1166/jno.2014.1583
dc.identifier.uri	http://repository.utm.md/handle/5014/14010
dc.description	Access full text - https://doi.org/10.1166/jno.2014.1583	en_US
dc.description.abstract	Binary unidirectional superimposed diffraction gratings with grating periods of 0.9 μm and 1 μm were formed in amorphous AsS films by e-beam recording. The influence of recording sequence of index superimposed gratings on their diffraction efficiency was evidenced. Enhancement of diffraction efficiencies of index superimposed gratings as compared to single gratings was revealed. Relief structures of superimposed gratings were fabricated by chemical etching. The surface relief modulation was studied by atomic force microscope. A beat period of 9 μm for relief complex structure was observed. The highest depth of relief modulation was about 70–80 μm.	en_US
dc.language.iso	en	en_US
dc.publisher	American Scientific Publishers	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	diffraction gratings	en_US
dc.subject	gratings	en_US
dc.subject	amorphous films	en_US
dc.subject	films	en_US
dc.subject	diffraction	en_US
dc.title	Binary Superimposed Gratings Formed by e-Beam Recording in Amorphous AsS Films	en_US
dc.type	Article	en_US