Tellurium Thin Films in Sensor Technology

TSIULYANU, D.

dc.contributor.author	TSIULYANU, D.
dc.date.accessioned	2021-03-19T09:38:04Z
dc.date.available	2021-03-19T09:38:04Z
dc.date.issued	2011
dc.identifier.citation	TSIULYANU, D. Tellurium Thin Films in Sensor Technology. In: Nanotechnological Basis for Advanced Sensors. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht, 2011, pp. 363-380. ISBN 978-94-007-0903-4.	en_US
dc.identifier.isbn	978-94-007-0903-4
dc.identifier.uri	https://doi.org/10.1007/978-94-007-0903-4_38
dc.identifier.uri	http://repository.utm.md/handle/5014/13904
dc.description	Access full text: https://doi.org/10.1007/978-94-007-0903-4_38	en_US
dc.description.abstract	An extensive review of the application of tellurium thin films in sensor technology is reported and discussed. Along with the traditional use of Te films in photo and strain sensitive devices, their modern application in chemical gas sensors is considered in detail. Fabrication parameters such as the technology of preparation, the substrate material, the thickness and morphology of the samples are shown to influence the response to gases. The effect of these parameters as well as that of temperature and thermal treatments on sensitivity, response and recovery times is discussed with respect to the structural evolution of the films, studied by SEM, XRD and XPS analyses. Further, the characterization of Te thin films for the detection of NO2, NH3and H2S as well as their cross-sensitivity to the main components of the atmosphere (O2, N2and H2O vapor) at different temperatures is given. The sensing mechanism is explained and the state of the art in the development of Te-based gas sensors operating at room temperature is considered.	en_US
dc.language.iso	en	en_US
dc.publisher	Springer Nature Switzerland	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	tellurium thin films	en_US
dc.subject	thin films	en_US
dc.subject	films	en_US
dc.subject	sensor technology	en_US
dc.subject	gas sensors	en_US
dc.subject	sensors	en_US
dc.title	Tellurium Thin Films in Sensor Technology	en_US
dc.type	Book chapter	en_US