Optical absorption of chalcogenide glassy photoresists As-S-Ge

MARIAN, S.; TSIULYANU, D. I.

dc.contributor.author	MARIAN, S.
dc.contributor.author	TSIULYANU, D. I.
dc.date.accessioned	2021-01-26T14:27:54Z
dc.date.available	2021-01-26T14:27:54Z
dc.date.issued	1995
dc.identifier.citation	MARIAN, S., TSIULYANU, D. I. Optical absorption of chalcogenide glassy photoresists As-S-Ge. In: International Conference on Microelectronics, 12-14 Sept. 1995, Nis, Serbia: proceedings, 1995, V. 1, pp. 69-71. ISBN 0-7803-2786-1.	en_US
dc.identifier.uri	https://doi.org/10.1109/ICMEL.1995.500837
dc.identifier.uri	http://repository.utm.md/handle/5014/12576
dc.description	Acces full text: https://doi.org/10.1109/ICMEL.1995.500837	en_US
dc.description.abstract	The absorption edge of some chalcogenide glassy semiconductors (ChGS) As-S-Ge both in bulk and thin films is studied. The region of the Urbach tail is considered particularly as it determines the efficiency of photostructural transformations of ChGS used in high-resolution lithography.	en_US
dc.language.iso	en	en_US
dc.publisher	IEEE	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	chalcogenide glassy semiconductors	en_US
dc.subject	glassy semiconductors	en_US
dc.subject	semiconductors	en_US
dc.subject	thin films	en_US
dc.subject	films	en_US
dc.subject	lithography	en_US
dc.title	Optical absorption of chalcogenide glassy photoresists As-S-Ge	en_US
dc.type	Article	en_US