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First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition

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dc.contributor.author GUARACAO, J. M. M.
dc.contributor.author KIRCHER, M.
dc.contributor.author WALL, F.
dc.contributor.author KRENKEL, M.
dc.contributor.author KAISER, B.
dc.contributor.author LANGA, S.
dc.contributor.author SCHENK, H.
dc.date.accessioned 2020-11-24T13:05:40Z
dc.date.available 2020-11-24T13:05:40Z
dc.date.issued 2020
dc.identifier.citation GUARACAO, J. M. M., KIRCHER, M., WALL, F. et al. First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition. In: IEEE IEEE International Ultrasonics Symposium (IUS): proseedings, 7-11 September 2020, Las Vegas, USA, 2020, pp. 1-4. ISSN 1948-5727. en_US
dc.identifier.uri https://doi.org/10.1109/IUS46767.2020.9251316
dc.identifier.uri http://repository.utm.md/handle/5014/11723
dc.description Acces full text: https://doi.org/10.1109/IUS46767.2020.9251316 en_US
dc.description.abstract The design, fabrication, and acoustic characterization of an electrostatic ultrasound transducer based on lateral actuation is documented in this letter. Unlike cMUTs or pMUTs, this device-NED-MUT -does not use a membrane to generate pressure waves but instead displaces air using the volume of the chip. A single transmitter unit, composed of 258 actuators in an area of 3×3 mm2 operating at 40 kHz, was capable of generating a pressure level of 87 dB (relative to 20 μPa rms) at a distance of 8.9 cm with an input voltage of 24V DC plus 24V AC. The measured performance makes the NED-MUT suitable for gesture recognition using ultrasound ranging. en_US
dc.language.iso en en_US
dc.publisher IEEE en_US
dc.rights Attribution-NonCommercial-NoDerivs 3.0 United States *
dc.rights.uri http://creativecommons.org/licenses/by-nc-nd/3.0/us/ *
dc.subject MEMS en_US
dc.subject Micro-Electro-Mechanical Systems en_US
dc.subject transducers en_US
dc.subject microbeams en_US
dc.subject ultrasound transducers en_US
dc.subject transducers en_US
dc.subject gesture recognition en_US
dc.title First Time of nanoscopic electrostatic drives pushing for ultrasonic transmission for gesture recognition en_US
dc.type Article en_US


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