Diffraction optical elements digital recorded in nanomultilayers As2S3- Se

Abstract

It is well known that films of chalcogenide glasses are an appropriate material for fabrication of diffraction optical elements (DOE) which manifest high resolution and transparency in the wide range of spectrum. However, there are problems related mostly with transmission changes in the films during recording. The low diffraction efficiency of DOE after recording is increased by subsequent chemical selective etching of the surface. This is a rather complex technological step, and the wet etching may distort the quality of optical surface of DOE.