Efficiency evaluation of ceramic mems device manufactured by laser micromilling

SAMOTAEV, Nikolay; OBLOV, Konstntin; IVANOVA, Anastasia; GORSHKOVA, Anastasiya; PODLEPETSKY, Boris

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Efficiency evaluation of ceramic mems device manufactured by laser micromilling

SAMOTAEV, Nikolay; OBLOV, Konstntin; IVANOVA, Anastasia; GORSHKOVA, Anastasiya; PODLEPETSKY, Boris

URI: http://repository.utm.md/handle/5014/5751

Date: 2019

Abstract:

This work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception.