Abstract:
In recent years, gas sensors based on oxide semiconductors such as copper oxide [1],
have a very high development progress, as their market demands are high for the detection of
toxic and flammable gases, as well as their low cost, functionality and higher sensor
performance are necessarily at elevated operating temperatures between 200-300 oC. For
these reasons, the need micro-heaters design and elaboration arises together with uniformity
of thermal distribution, low energy consumption and prices, as well as compatibility with the
sensor technological processes for integration in microsystems.