Novel Microcolumn Using a Multi-gated Field Emitter

Abstract

Recently, our group has developed four- and fivegated field emitter arrays (FEAs) with an electrostatic lens (einzel lens).1, 2) The five-gated FEA has successfully realized a crossover of the electron beam without any external optical system. However, these multi-gated FEAs has large aberrations due to the highly negatively biased einzel lens with a small aperture and a large electron emission angle at the incident plane of the lens electrode.