In this work an individual Pd-modified ZnO nanowire (Pd/ZnO NW) was integrated into a nanosensor device using focused ion beam (FIB)/scanning electron microscopy (SEM) system. The Pd/ZnO arrays were synthesized by electrochemical deposition. Both ends of Pd/ZnO NW were connected by Pt complex to Au/Cr pads forming a two-terminal device with Schottky contacts. The fabricated nanodevice shows high performance gas sensing properties at room temperature with the response of ~ 1700% to 1000 ppm hydrogen. The methodology and principle illustrated in this research can be extensively applied to other individual nanostructures of different materials in a wide range of applications.