Sensors for detecting different types of gases: VOCs and battery

Abstract

In the given work is presented the fabrication of sensors based on AlOx on columnar zinc oxide structures utilizing cost-effective methods for gas sensor development. To obtain the sensors based on AlOx on columnar zinc oxide structures, the chemical synthesis from solution (SCS) method was used to obtain the nanostructured columnar ZnO film and atomic layer deposition (ALD) was used to deposit different thicknesses of AlOx. In the same way, AlOx can be deposited over CuO nanostructured films. Different types of heat treatments were used to improve the morphological, structural, chemical and sensory properties.