Structure evolution and properties of multilayer coatings based on refractory metal nitride WN

Abstract

Recently, the intensive development of modern technologies has been stimulating the need to improve the protective properties of materials and their durability. They must withstand extreme operating conditions, such as high temperatures, external stresses, and aggressive oxidizing environments, which can lead to their degradation and destruction. Therefore, protective coatings with high mechanical and tribological properties, resistance to heat and corrosion, and chemical inertness are successfully used in various industry branches. In particular, transition metal nitrides are very popular for different applications and are actively studied by materials science experts. For instance, in the form of thin coatings, they can be used for multilayer metallization of integrated circuits. Moreover, they can be excellent candidates for diffusion barriers, which are placed between metal and semiconductor/insulator to prevent any harmful interactions between two materials.