SAMOTAEV, Nikolay; OBLOV, Konstntin; IVANOVA, Anastasia; GORSHKOVA, Anastasiya; PODLEPETSKY, Boris
(Tehnica UTM, 2019)
This work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser ...