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Microfabrication of FePt/W/FePt multilayer heterostructures via photolithography for spintronic applications
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| dc.contributor.author | COSTAS, A. | |
| dc.contributor.author | SCHINTEIE, G. | |
| dc.contributor.author | GHEORGHE, K. | |
| dc.contributor.author | GRIGORE, R. | |
| dc.contributor.author | LAVRIC, R. | |
| dc.contributor.author | KUNCSER, A. | |
| dc.contributor.author | KUNCSER, V. | |
| dc.date.accessioned | 2026-10-13T16:51:13Z | |
| dc.date.available | 2026-10-13T16:51:13Z | |
| dc.date.issued | 2026 | |
| dc.identifier.citation | COSTAS, A.; G. SCHINTEIE; K. GHEORGHE; R. GRIGORE; R. LAVRIC; A. KUNCSER and V. KUNCSER. Microfabrication of FePt/W/FePt multilayer heterostructures via photolithography for spintronic applications. In: 10th International Symposium on Dielectric Materials and Application, Abstract Book, ISyDMA’10, Chisinau, Republic of Moldova, 30 June -4 July, 2026. Technical University of Moldova. Chişinău: 2026, p. 45. | en_US |
| dc.identifier.uri | https://repository.utm.md/handle/5014/37362 | |
| dc.description | This work was supported by the Romanian Ministry of Research, Innovation and Digitalization through project 760083/23.05.2023, CF60, 3D Magnetic Nanostructures for Advanced Technologies and by the Core Program of the National Institute of Materials Physics under the project PC1-PN23080101. | en_US |
| dc.description.abstract | This work reports on the design and microfabrication of magnetic multilayer heterostructures based on FePt thin films, targeting their integration in planar spin valve architectures. A key focus is placed on the development and optimization of a reliable fabrication strategy based entirely on multi-step photolithography, enabling precise pattern definition and alignment at the micrometer scale through the use of dedicated alignment markers. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | photolithography | en_US |
| dc.subject | microfabrication | en_US |
| dc.title | Microfabrication of FePt/W/FePt multilayer heterostructures via photolithography for spintronic applications | en_US |
| dc.type | Article | en_US |
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10th International Symposium on Dielectric Materials and Applications (ISyDMA’10)
Chisinau, Republic of Moldova, June 30 - July 4, 2026
Except where otherwise noted, this item's license is described as Attribution-NonCommercial-NoDerivs 3.0 United States