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Методы повышения точности решающих правил контроля при производстве кристаллов микросхем
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| dc.contributor.author | ДОЛГОВ, Алексей Юрьевич | |
| dc.date.accessioned | 2019-12-06T13:32:37Z | |
| dc.date.available | 2019-12-06T13:32:37Z | |
| dc.date.issued | 2012 | |
| dc.identifier.citation | ДОЛГОВ, Алексей Юрьевич. Методы повышения точности решающих правил контроля при производстве кристаллов микросхем. In: Telecommunications, Electronics and Informatics - ICTEI 2012: proc. of the 5th intern. conf., Technical University of Moldova, May 11-13, 2012. Chișinău, 2012, Vol. 1, pp. 340-345. ISBN 978-9975-45-082-9. | en_US |
| dc.identifier.isbn | 978-9975-45-082-9 | |
| dc.identifier.uri | http://repository.utm.md/handle/5014/7336 | |
| dc.description.abstract | Three solving rules operation selective control on small size samples (n=5 and 10), suitable for technological process of manufacture of integrated circuits crystals, allowing to reduce a subjective component of predicted reject up to 2, 3 times in comparison with operating check methods. | en_US |
| dc.language.iso | ru | en_US |
| dc.publisher | Technical University of Moldova | en_US |
| dc.rights | Attribution-NonCommercial-NoDerivs 3.0 United States | * |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/3.0/us/ | * |
| dc.subject | кристаллы микросхем | en_US |
| dc.subject | электрические кристаллы | en_US |
| dc.subject | электрофизические кристаллы | en_US |
| dc.title | Методы повышения точности решающих правил контроля при производстве кристаллов микросхем | en_US |
| dc.type | Article | en_US |
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