Interferometric Method Application for Sub-micrometers Thickness Measurements of Spin-coated PEPC and PETPC Polymer Films

MESHALKIN, A.; ANDRIES, A.; ACHIMOVA, E.; BETS, L.; ANDRIES, I.; DRAHNEA, S.

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dc.contributor.author	MESHALKIN, A.
dc.contributor.author	ANDRIES, A.
dc.contributor.author	ACHIMOVA, E.
dc.contributor.author	BETS, L.
dc.contributor.author	ANDRIES, I.
dc.contributor.author	DRAHNEA, S.
dc.date.accessioned	2019-10-24T12:55:32Z
dc.date.available	2019-10-24T12:55:32Z
dc.date.issued	2011
dc.identifier.citation	MESHALKIN, A., ANDRIES, A., ACHIMOVA, E. et al. Interferometric Method Application for Sub-micrometers Thickness Measurements of Spin-coated PEPC and PETPC Polymer Films. In: ICNBME-2011. International conference on Nanotechnologies and Biomedical Engineering. German-moldovan workshop on Novel Nanomaterials for Electronic, Photonic and Biomedical Applications: proc. of the intern. conf., July 7-8, 2011. Chişinău, 2011, pp. 194-197. ISBN 978-9975-66-239-0.	en_US
dc.identifier.isbn	978-9975-66-239-0
dc.identifier.uri	http://repository.utm.md/handle/5014/5230
dc.description.abstract	This paper deals with the interferometric thickness measurements of spin-coated thin polymer films. Spin coating is currently the predominant technique employed to produce uniform thin films of polymers in sub-micrometer range. But the thickness measurement of such thin films requires the application of high precision methods. In the paper we design and develop the system based on the common interferometer MII-4 and digital camera for measurement of the thin PEPC and PETPC polymer films. Different concentration of polymer solution and spin speed were used in order to obtain thin films with variable thickness (from 100 nm to 1000 nm) by spin coating technique.	en_US
dc.language.iso	en	en_US
dc.publisher	Technical University of Moldova	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	thin polymer layers	en_US
dc.subject	spin-coating	en_US
dc.subject	interferometric thickness measurements	en_US
dc.title	Interferometric Method Application for Sub-micrometers Thickness Measurements of Spin-coated PEPC and PETPC Polymer Films	en_US
dc.type	Article	en_US