Evolution of scanning and of the probe microscope checking methods of the electronic products

dc.contributor.author	ARMENCEA, Nicolae
dc.date.accessioned	2019-10-17T09:23:31Z
dc.date.available	2019-10-17T09:23:31Z
dc.date.issued	2005
dc.identifier.citation	ARMENCEA, Nicolae. Evolution of scanning and of the probe microscope checking methods of the electronic products. In: Microelectronics and Computer Science: proc. of the 4th intern. conf., September 15-17, 2005. Chişinău, 2005, vol. 1, pp. 216-218. ISBN 9975-66-038-X.	en_US
dc.identifier.isbn	9975-66-038-X
dc.identifier.uri	http://repository.utm.md/handle/5014/4775
dc.description.abstract	It is organized comparative analysis of possibilities, merits and demerits of the laser scanning and electronic microscopic methods of checking the electronic products. There are considered the principles of operation of the tunnel scanning and atom force microscopes, which spatial resolutions reaches the pica- meters.	en_US
dc.language.iso	en	en_US
dc.publisher	Technical University of Moldova	en_US
dc.rights	Attribution-NonCommercial-NoDerivs 3.0 United States	*
dc.rights.uri	http://creativecommons.org/licenses/by-nc-nd/3.0/us/	*
dc.subject	laser microscopes	en_US
dc.subject	electronic microscopes	en_US
dc.subject	atom force scanning microscopes	en_US
dc.subject	microscopes	en_US
dc.subject	scanning	en_US
dc.subject	electronic products	en_US
dc.title	Evolution of scanning and of the probe microscope checking methods of the electronic products	en_US
dc.type	Article	en_US