Modern and low-cost technology with rapid photothermal processing for silicon solar cells fabrication

Abstract

The modern and inexpensive Nonconventional Technology with Rapid Photothermal Processing (RPP) and Rapid Thermal Processing (RTP) presents an important direction in the advanced technologies for micro-nano-electronics and solar cells fabrication. The priority of this technology compared to that conventional is in rapidity of the technological processes (diffusion, implantation and oxidation), energy budget, materials and gases reduction etc. RPP provide materials with homogenous microstructures, higher performance, higher reliability and yields of semiconductor devices. This report concern the investigations of most important steps of RPP solar cells fabrication: enhanced diffusion of P and B in silicon, Zn in GaAs and physic-mathematic model, shallow and ultra-shallow n+- p and n+- p – p+ junctions in Si, GaAs, and ohmic contacts.