Browsing 2013 by Subject "hydrogen chloride"

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  • RAEVSCHI, Simion; BOTNARIUC, Vasile; GORCEAC, Leonid; TIRON, Stefan; KOMPAN, Mihail; ZHILYAEV, Yurii (Tehnica UTM, 2013)
    There were obtained nanodimensional AlN layers on Si by HVPE (Hydride Vapor Phase Epitaxy) method. SEM (Scanning Electron Microscopy) images of AlN layers, and cross-sections of AlN/Si structures are shown. The structure ...

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