Browsing 2023 by Subject "electron beam lithography"

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  • DINESCU, Adrian; DRAGOMAN, Mircea; AVRAM, Andrei; DRAGOMAN, Daniela (Springer Nature Switzerland, 2023)
    Many advances in fabrication processes at micro and nanoscale in the past two decades were possible due to scanning electron microscopy, which is now an indispensable tool for analyzing and fabricating new nanostructures ...

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