POSTICA, V.; REIMER, T.; LAZARI, E.; ABABII, N.; SHISHIYANU, S.; RAILEAN, S.; KAIDAS, V.; KAPS, S.; LUPAN, O.; BENECKE, W.; ADELUNG, R.
(Tehnica UTM, 2015)
In this work, ultra-thin TiO2 nanostructured films, synthesized by atomic layer deposition method (ALD), were integrated in sensor structures. The effect of post-growth annealing and thickness of TiO2 samples on UV and ...