Browsing Conferinţe by Subject "e-beam recording"

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  • ABASHKIN, Vladimir; ACHIMOVA, Elena; SERGHEEV, Sergei; PRISACAR, Alecsandr (Tehnica UTM, 2013)
    In this paper, we present the PC-assisted e-beam recording of some diffraction structures in As2S3 thin films with thickness about 1 μm. The square surfaces occupied by holograms on the film were from 400 x 400 μm2 up to ...

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