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impurity atoms (1)
impurity subsystems (1)
infrared reflectivity spectra (1)
infrared transmission (1)
injections (1)
IPC: F03C1/04(2000.01) (1)
IPC: C23C 10/00 (2000.01) (1)
IPC: C23C 10/52 (2000.01) (1)
IPC: C23C 9/02 (2000.01) (1)
IPC: C23C 9/04 (2000.01) (1)
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