KOROTCENKOV, Ghenadii; BRINZARI, Vladimir; STETTER, Joseph R.; BLINOV, Iuri; BLAJA, Valeriu
(Elsevier, 2007)
This paper analyzes the processes controlling the rate of conductivity response of In2O3-based thin film sensors to both reducing and oxidizing gases. In2O3 films with a thickness from 20 to 400nm were deposited using a ...