GHIMPU, L.; COJOCARU, V.; SOROCEANU, M.; SACARESCU, L.; KATASHEV, A.; HARABAGIU, V.; TIGINYANU, I.
(IEEE, 2012)
Zinc oxide films were deposited by method rf magnetron sputtering in a mixed environment of oxygen and argon on two types of substrates, glass and silicon substrates with different orientations, by varying the deposition ...