Browsing by Subject "nano-e-drives"

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  • LANGA, S.; CONRAD, H.; KAISER, B.; STOLZ, M.; GAUDET, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H. (Springer Nature Switzerland, 2003)
    This paper presents the technological aspects of a newly demonstrated actuation principle, the so-called nano-e-drive. Using this principle, cantilevers can be moved in or out of chip plane. In this paper, only the ...

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