LANGA, S.; CONRAD, H.; KAISER, B.; STOLZ, M.; GAUDET, M.; UHLIG, S.; SCHIMMANZ, K.; SCHENK, H.
(Springer Nature Switzerland, 2003)
This paper presents the technological aspects of a newly demonstrated actuation principle, the so-called nano-e-drive. Using this principle, cantilevers can be moved in or out of chip plane. In this paper, only the ...