TIGINYANU, Ion M.; POPA, Veaceslav; SARUA, Andrei; HEARD, Peter J.; VOLCIUC, Olesea; KUBALL, Martin
(Society of Photo-Optical Instrumentation Engineers, SPIE, 2009)
We demonstrate the possibility for controlled micro- and nanostructuring of GaN layers by low-dose focusedion-beam (FIB) treatment with subsequent photoelectrochemical (PEC) etching. The proposed novel maskless approach ...